The NanoSIMS 50L, manufactured by CAMECA under a ONERA-UPS license, is a UHV analytical scanning SIMS microprobe with the following unique features:
— High Mass resolution together with high transmission,
— High imaging resolution down to 50nm,
— Simultaneous detection of up to seven masses (SIMS) plus secondary electron image,
— Coaxial ion optics common to primary and secondary ions and electrons.
The NanoSIMS 50L description is split in two parts, as shown in the following synoptic:
— a main system (in grey),
— different accessories (in pink) that can be added to increase specific performance or meet customers needs: Electron flood gun, SEM detector, additional Faraday detectors, NMR probe for hydrogen, duplication of control.