Plasma Asher/Stripper

Hanke lühikirjeldus

Plasma stripper with microwave generator produces a very high concentration of radicals with low energy ion bombardment and it can be used for resist removal and wafer surface cleaning. Plasma stripper/Asher was designed for basic production applications in the high-volume manufacturing of advanced semiconductor products, and related microelectronics industries such as power devices, MEMS, etc.

The object of the tender process is described in more detail in the invitation to tender documents.
The options have been described in the invitation to tender documents.