The object of this information request is LPCVD LTO/PSG furnace. VTT is preparing the procurement of a new LTO PSG LPCVD furnace in VTT's microelectronics cleanroom located in Espoo Finland (
https://www.vttmemsfab.fi). The object of this information request is LPCVD LTO/PSG furnace. VTT is preparing the procurement of a new LTO PSG LPCVD furnace in VTT's microelectronics cleanroom located in Espoo Finland ((
https://www.vttmemsfab.fi). With this market survey, VTT is searching for potential suppliers and equipment available to get additional information on suppliers capable of delivering the equipment described in this information request. The LTO/PSG furnace must be able to process thin films for the fabrication of optically and electrically active devices at the front end. The LTO/PSG films will be used in silicon photonics devices, radiation detectors, and MEMS sensors, which are the main product lines in the fab. The required properties are low and controllable particle level, small footprint. Some key features: • wafer size up to 200-mm • process wafers in one run must be at least 40 wafers • LTO and PSG process: — to process Low-Temperature Oxide — to process PSG (phospho-silicate glass) — Process temperature of 425 • Gas requirements — gas available at VTT is 100 % concentration of SiH4 — Silane (SiH4) — Phosphine (1 % PH3 in N2) — Nitrogen (N2) — Oxygen (O2) • Software: — The software must be compatible with Windows 10. • Operating system: — Operating system must be Windows 10, Linux or Unix • Quartz Ware: — The equipment must include two (2) sets of boats for Ø 200 mm wafer processing. One (1) boat for LTO, one (1) PSG. — The equipment must include two (2) sets of boats for Ø 150 mm wafer processing. One (1) boat for LTO, one (1) for PSG. • Cleanliness: — ISO 4 • Possible extra features: — Auto Wafer loading With this information request, VTT inquires your opinion about the following: — your capability to sell the equipment described above, — description of the equipment, — delivery time, — pricing model. In case you are a supplier of the equipment described in this information request, please send your answer with the requested information by e-mail to Mikko Järvi,
Mikko.Jarvi@vtt.fi by 12.00 (Finnish time) 7 January 2021. VTT will make a decision about the possible competitive bidding process after this survey is completed.