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A user-friendly scanning electron microscope (SEM) to examine materials in the range of isolators, semiconductors and metals — typically semiconducting metal oxides, with both energy dispersive x-ray spectroscopy (EDS) and cathodoluminescence-spectroscopy (CLS) capabilities. The system will be operating in a clean room user facility with ISO 4 calssification. Option for an ion beam polisher for preparing samples for the SEM.