Evaporation System (Organics/Metals) Integrated with Glovebox

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Aalto University School of Electrical Engineering, Department of Electronics and Nanoengineering is conducting research on the fabrication and characterization of organic devices, including the deposition of organic thin films as well as metal films. The evaporation system is expected to be capable of fabricating a single organic device (i.e. organic layer/one metal layer) without need to break vacuum, thus a ‘mask-change accessory’ in vacuum is needed. The evaporation system is required to be integrated with a GloveBox module, to allow handling of organic devices in a controlled environment (oxygen, humidity) upon fabrication. In-situ Quartz Crystal Microbalance (QCM) will be used to monitor film growth inside the evaporation system. For further information, see separate documents (as attachment files at the Hanki/Tarjouspalvelu Service at https://www.hanki-palvelu.fi/en/).