Deep reactive ion etcher tool

Information

Tender type

02 - Contract notice

Procedure

Open procedure

Publication date

12/6/2021 2:19 PM (GMT+01:00)

Closing date

1/17/2022 11:59 PM (GMT+01:00)

Buyer

Name

Kungliga Tekniska högskolan

Department

Contact

Karin Edoff

Address

Drottning Kristinas väg 6
11428 Stockholm
Sweden

Org. number

202100-3054

Website

www.kth.se

Closing date has passed.

Short description

Purpose of procurement KTH is seeking tenders for a new state-of-the-art research tool to be placed in the clean-room of eLAB at KTH, for research on deep-etching of silicon wafers by plasma. Mainly used for research in micro-electromechanical systems and nanotechnology.

Files (click "Show interest" to get access)

Name	Size
1-AllDocuments.pdf	525 KB
Samtlige+vedlagte+dokumenter.zip	648 KB

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