Rapid thermal annealing furnace

Information

Tender type

03 - Contract award notice

Procedure

Open procedure

Publication date

5/12/2023 9:32 AM (GMT+02:00)

Buyer

Name

Kungliga Tekniska högskolan

Department

Contact

Karin Edoff

Address

Drottning Kristinas väg 6
11428 Stockholm
Sweden

Org. number

202100-3054

Website

www.kth.se

Assignment text

Purpose of procurement KTH is seeking tenders for a Rapid thermal annealing furnace. The primarily purpose of the tool is to facilitate dopant activation anneals in Si, silicide formation and contact formation anneals on SiC wafers.

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