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Rapid thermal annealing furnace
Information
Notice type
Tender type
03 - Contract award notice
Procedure
Offenes Verfahren
Estimated tendering starting date
Estimated tendering closing date
Publication date
12.05.2023 09:32 (GMT+02:00)
Closing date
Questions closing date
Recommended document due date
Accepts parallel bids
No
Accepts variant bids
No
Buyer
Name
Kungliga Tekniska högskolan
Kungliga Tekniska högskolan
Department
Contact
Karin Edoff
Karin Edoff
Address
Drottning Kristinas väg 6
11428
Stockholm
Schweden
Org. number
202100-3054
Website
www.kth.se
Assignment text
Purpose of procurement KTH is seeking tenders for a Rapid thermal annealing furnace. The primarily purpose of the tool is to facilitate dopant activation anneals in Si, silicide formation and contact formation anneals on SiC wafers.
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