Spectroscopic ellipsometer

Eesmärk

This tender is for the acquisition of a spectroscopic ellipsometer intended for a university facility, which provides access to an extensive suite of characterization tools as one of its core purposes. The facility caters to users from various levels of experience and technical backgrounds within the university and serves commercial customers as well. The user community today is more than 100. The instrument is to replace an existing tool so we need to make sure that the new system can at least meet the specifications of the old one which is reflected in the specified technical requirements. We have a broad user base for the instrument ranging from users that just need to measure the thickness of a dielectric thin film on a silicon substrate to more advanced users working on developing new materials for micro and nanofabrication with specific optical properties. Therefore, we need a state-of-the-art instrument that can meet all current and future needs for ellipsometry from our users. We will have a large number of users on the system so it is important that the system is user-friendly so that time for user training can be limited and the threshold for using the equipment is low. Already today our current ellipsometer is heavily used and becoming a bottleneck, so it is very important that measurements on the future system are fast, both for single measurements and wafer mapping measurements. To limit the users time at the instrument it is also very important that all users have the possibility to have access to the analysis software from their own desk.