Fluorine-CryoRIE System

Information

Tender type

02 - Contract notice

Procedure

Open procedure

Publication date

11/18/2020 2:12 PM (GMT+01:00)

Closing date

12/16/2020 11:59 PM (GMT+01:00)

Buyer

Name

Kungliga Tekniska högskolan

Department

Contact

Karin Edoff

Address

Brinellvägen 8
10044 Stockholm
Sweden

Org. number

202100-3054

Website

www.kth.se

Closing date has passed.

Short description

KTH and Albanova Nanolab intends to purchase a new RIE/ICP system (equipped with load-lock and cryo-stage) dedicated to fluorine based processing. The main use of the tool will be to reactively etch dielectrics, metals, and various superconductors, as well as low pressure argon milling of inert materials. The system should be able to perform high-quality anisotropic, deep silicon etching.

Files (click "Show interest" to get access)

Name	Size
1-AllDocuments.pdf	732 KB
Samtliga+bifogade+dokument.zip	701 KB

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