X-ray Photoelectron Spectroscopy (XPS) setup and Ultra-High Vacuum (UHV) Linear Transfer System (LTS)

Tildelingsinformationer

DTU will like to purchase an X-ray Photoelectron Spectroscopy (XPS) setup and an Ultra-High Vacu-um (UHV) Linear Transfer System (LTS) that connects the XPS system with other existing and planned setups (5 in total). The setup will be used by academic researchers investigating catalysts. The XPS system must be able to perform: - High-resolution XPS using monochromized Al K-alpha photons. - Angle resolved XPS for non-destructive depth profiling. - Low energy ion scattering spectroscopy (ISS) using helium ions and heavier ions such as ne-on, argon or xenon. - Ultraviolet Photoelectron Spectroscopy using a helium UV source. - Sputter cleaning of substrates and destructive depth profiling using an Argon ion gun. - Measurements on SHOM flag style sampleholders and on larger samples corresponding to a standard 4” wafer. The LTS will facilitate transfer of samples (samples up to 3 x 3 cm2 mounted on SHOM flag style sampleholder) under UHV conditions to prevent air exposure when samples are being transferred be-tween different setups. Through the combined purchase of the XPS and LTS system, we are looking for a solution that will enable a robust transfer of samples under UHV conditions and further establish a working solution for connecting future setups to the LTS.