Active anti-vibration system for a Raith EBPG5200 electron beam lithography tool

Information

Offentligt udbud
10-03-2021 16:58 (GMT+01:00)
24-03-2021 15:00 (GMT+01:00)

Indkøber

Aalto University Foundation sr Aalto University Foundation sr
Floris Reurings Floris Reurings
AALTO
Finland
2228357-4
www.aalto.fi

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Kort beskrivelse

Active anti-vibration system for a Raith EBPG5200 electron beam lithography tool. For further information, see separate documents (as attachment files at the Hanki / Tarjouspalvelu Service at https://www.hanki-palvelu.fi/en/).

Description of options: Accessories, maintenance and spares.

Filer

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Active anti-vibration system for a Raith EBPG5200 electron beam lithography tool_liitteet.zip 466 KB
Active anti-vibration system for a Raith EBPG5200 electron beam lithography tool.pdf 90 KB

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