Sub-micron Direct Photolithography System

Information

Tender type

15 - Voluntary ex ante transparency notice

Procedure

Negotiated procedure without prior publication

Publication date

10/28/2020 9:29 AM (GMT+01:00)

Buyer

Name

Kungliga Tekniska högskolan

Department

Contact

Karin Edoff

Address

Brinellvägen 8
10044 Stockholm
Sweden

Org. number

202100-3054

Website

www.kth.se

Assignment text

The Albanova Nanolab (ANL) at KTH requires a sub-micron photolithography system capable of direct writing in common photoresists with sub-micron resolution at high through-put.

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