Deep reactive ion etcher tool

Information

03 - Contract award notice
Open procedure
15.06.2022 09:28 (GMT+02:00)

Buyer

Kungliga Tekniska högskolan Kungliga Tekniska högskolan
Karin Edoff Karin Edoff
Drottning Kristinas väg 6
11428 Stockholm
Sweden
202100-3054

Assignment text

Purpose of procurement KTH is seeking tenders for a new state-of-the-art research tool to be placed in the clean-room of eLAB at KTH, for research on deep-etching of silicon wafers by plasma. Mainly used for research in micro-electromechanical systems and nanotechnology.

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