LPCVD LTO/PSG Furnace

Information

Tender type

02 - Contract notice

Procedure

Open procedure

Publication date

2/8/2021 12:24 PM (GMT+01:00)

Closing date

3/8/2021 2:00 PM (GMT+01:00)

Buyer

Name

VTT Technical Research Centre of Finland Ltd

Department

Contact

Address

PO Box 1000, VTT
02044 Espoo
Finland

Org. number

2647375-4

Website

www.vtt.fi

Closing date has passed.

Short description

The object of the procurement is LPCVD LTO/PSG furnace for VTT Micronova cleanroom front end. LPCVD furnace is for front end 200 mm and 150 mm wafer processing. The object of the tender process is described in more detail in the invitation to tender documents.

Files (click "Show interest" to get access)

Name	Size
LPCVD LTO_PSG Furnace_liitteet.zip	2.02 MB
LPCVD LTO_PSG Furnace.pdf	218 KB

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